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MicroSeal™ Product Selection Guide

The MicroSeal TM family is a complete line of high purity, high integrity seals for industrial and semiconductor applications including low flow, high flow, high pressure and low pressure drop. We also offer orifice seals and blind seals to cap off spare ports. Other key benefits include high cleanliness and passive, chrome rich, low Ra surface finishes. MicroSeals retrofit to standard “C” seal systems. Our seals meet SEMI Standard PR 3.1, 3.5 and new high-flow standards.

The MicroSeal design has a softer, more compliant interface that molds itself to the mating surface ensuring leak tightness, and eliminating virtual leaks without sacrificing rebound characteristics. This is the only high compliance seal on the market with high rebound.
MicroSeals rebound rate exceeds competing seal designs by as much as ten times and they are particularly forgiving of cavity tolerance. This ensures that the sealing surfaces stay in intimate contact during pressure, temperature and vibration extremes. All these characteristics are achieved with low compression rates, ensuring high first pass yield. 

Key MicroSeal Benefits 

Lowest Pressure Drop Design 

Optimized I.D. Bore for Lowest Pressure Drop In Medium Flow, High Flow, Vapor and
Liquid Delivery Systems 

Lowest Compression to Ensure Highest Reliability of Gas / Liquid Delivery Systems 

10x’s Seal Rebound vs. Traditional designs to achieve Leak Integrity under Shock and
Vibration (Patented) 

SEMI PR 3.1 and 3.5 Compliant

Ultra High Purity Double Melt 316 Stainless Steel 

Ultraclean Passive Chrome Rich Surface

5 Ra wetted surface finish 

Compressor Ring Design Eliminates Virtual Leaks (Patented)

Exceptional First Pass Yield on Seal Makeup - Virtually Eliminates High Cost Rework an
Scrap

Rapid Delivery 

MICROSEALTM MODULAR SURFACE MOUNT SEAL TEST SUMMARY 

Tests were conducted according to section 5.9 of SEMI Guide to Performance Specifications and Test Methods for Sealing Systems, which address the mechanical aspects of the sealing system for 1.125 and 1.5 inch gas distribution system components.
PERFORMANCE TEST ACCEPTANCE CRITERIA PERFORMANCE

Material
Cr/Fe Ratio
Oxide Thickness (less carbon)

Surface Roughness / Defects

316L VIM VAR
Cr/Fe ratio > 2.0
CrO Thickness > 20 angstroms

10 micro inch / less than 25 defects
per location 

>0.004% Sulfur content
Cr/Fe ratio 2.5
CrO thickness (less Carbon) 35 angst.

 Less than 1micro inch / less than 1 defect per
location 

Leak Tests, Design Pressure
(5000 psig) 
Outboard leakage: <1 x 10
atm·cc/sec He
Outboard leakage: <7 x 10¹¹ atm·cc/sec He at
100 psig after exposure to 5000 psig
Pressure Tests-Proof at
7500psig

Burst Test (hydrostatic)
No hydrostatic test fluid shall be
visible. Inboard leakage: <7 x 10¹¹
atm·cc/sec He 

No hydrostatic test fluid visible.
Proof parts leak tight <7 x 10¹¹

Burst at > 20,000 psig

Vibration-MILSPEC 810E Sec 1
Category 1

Shock – Drop test in 25G
increments
Inboard leakage: <1 x 10 atm·cc/sec
He after testing

No Spec on Shock
Inboard leakage: <7 x 10¹¹ atm·cc/sec He after MIL-SPEC 810E Sec 1-3 category 1test.

Shock exceeding >294G’s – No leaks
Pre-load Safety Factor Inboard leakage: <1 x 10 atm·cc/sec
He at 80% and 120% of
manufacturers’ specified torque
setting. 
Inboard leakage: <7 x 10¹¹ atm·cc/sec He at 10,
15, 24, 30, 36, and 48 in/lbs torque. 
Repeatability-Make and remake
substrate with 20 sets of new
seals. 
Inboard leakage: <1 x 10 atm·cc/sec
He after 20 re-make cycles. 
Passed Inboard leak: <7 x 10¹¹ atm·cc/sec He
at each make and remake and after 20 re-make
cycles.
Tested at 10, 24, and 48 in/lbs torque
Torsion Inboard leakage: <1 x 10 atm·cc/sec
He after testing at 50,75,and 100 ft/lbs.
Inboard leakage: <5 x 10¹¹ atm·cc/sec He after
torque test. 
Temperature Cycling Inboard leakage: <1 x 10 atm·cc/sec
He after temperature testing. Three
sets of two port seals room
temperature, 100°C, room
temperature, -10°C; five cycles
Inboard leakage: Passed leak test
<7 x 10¹¹ atm·cc/sec He at each temperature. 
Temperature Shock Test Shock 200°C to -196°C Shock test +200°C to -196°C (direct insertion
into Liquid N2)
No Leaks at <7 x10¹¹ atm·cc/sec He
Compression Load Test  Compress from .062 to .050 inch
Measure Load
Standard Seal - 685 lbs
Low Load Seal - 618 lbs

 

Photos of counterbore characteristics

Good-Burnished-2

Good

Burnished

Reject-Non-Concentric Tool Marks

Reject

Non-Concentric - Tool Marks

Reject-Damage Burnished tool

Reject

Damaged - Burnished tool

Reject-Scratch

Reject

Scratch

Reject-Chatter

Reject

Chatter

Reject-Dirt

Reject

Dirt